Laboratory Vacuum Pvd Rf Magnetron Sputter Oxide Coating Machine
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Single-target RF magnetron sputtering coater CY-MSP300S-RF
Single-target RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It has the characteristics of miniaturization and standardization. The magnetron target head has 1 inch 2 inches and 3 inches to choose from. Customers can choose the target according to the size of the substrate to be plated. The device is equipped with 300W RF power supply, which can be used for sputtering of non-metal film and optical film. According to the experimental requirements, other specifications of DC or RF power supply can be selected to realize the coating operation of various materials.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.
Single-target RF magnetron sputtering coater technical parameters:
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Sample stage |
Size:φ185mm Temperature control accuracy:±1℃ Heating temperature:Max 500℃ Rotate speed:1-20rpm adjustable |
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Magnetron Sputtering target head |
2”×1 (1”,2”,3”optional) Circulating water chiller with flow rate of 10L/min |
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Vacuum chamber |
Chamber size:φ300mm×300mm Watch window:φ100mm Chamber material:Stainless steel Opening mode:Top cover removable |
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Mass flow meter |
2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs) |
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Vacuum system |
Model:CY-GZK103-A Pumping interface:KF40 Molecular pump:CY-600 Exhaust interface:KF16 Backing pump:rotary vane pump Vacuum measurement:Compound vacuum gauge Ultimate vacuum:1.0E-5Pa Power supply:AC;220V 50/60Hz Pumping rate:Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes |
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Power configuration |
RF power supply ×1;Max output power:300W |
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Other parameters |
Supply voltage:AC220V,50Hz Overall size:600mm×650mm×1280mm Total power:2KW Total Weight:300kg |
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Automation Grade |
Semi-Automatic |
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I deal in |
New Only |
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Is It Anodized |
Anodized |
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Is It Customized |
Customized |
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Product Type |
Other |
Business Nature
Manufacturer
Country/Region
Zhengzhou, China
Main Products
Plasma Coating Instrument, Evaporation Coating Instrument, Magnetron Sputtering Coating Instrument...
Our mainlyproducts，Magnetron sputtering coating instrument, evaporation coating instrument, plasma coating instrument, homogenizer, coating machine, plasma cleaning machine, electrostatic spinning，Induction melting furnace and etc. We have our own manufacturing base factory as while as many sub-contracting factories, which enable us a reliable manufacturing ability and quality control system. We are capable of supplying both the equipment and technologies according to customers' different requirements and realities, and we have lots of successful projects in many different countries and regions, like East Europe, South Asia, South America, Australia and New Zealand, and Africa. "Profession, Quick Response, Hard Work, and Sincerity" is the strength of our team, earning us a sound reputation among our clients. We are open and willing to work with clients from different countries and regions.
